Zeiss Integrates LEO Brand Electron Beam Technology

Published: Sunday, May 16, 2004 - 22:00

Carl Zeiss SMT AG has incorporated the electron beam technology business formerly marketed under the LEO brand.

LEO will become the new Nanotechnology Systems Division of Carl Zeiss SMT. LEO has been a wholly owned subsdiary of Carl Zeiss SMT AG since 2001. "With this step, we’re accomplishing the complete integration of electon beam technology into the Carl Zeiss SMT portfolio," says Dirk Stenkamp, CEO of the LEO group. "We expect many different synergies. The innovative power of electron beam techology will receive a clear boost under the aegis of SMT and will simultaneously benefit from the worldwide image provided by the Carl Zeiss brand."

Carl Zeiss SMT is already one of the global market leaders in the manufacture of light optical systems for semiconductor production. The integration of electron beam technology adds a range of applications in the field of semiconductor manufacture. One of the first applications is the repair of photo masks for semiconductor lithography.

"SMT will become a solution provider in the areas of semiconductors and nanotechnology while continuously enhancing its product portfolio for its end-customer business," continues Stenkamp. "All electronic beam, ion beam and other analysis technologies, as well as applications in materials analysis, life sciences and semiconductor technology, will be consistently sustained and expanded."

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