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Chromatic, Confocal Noncontact Sensor for Semiconductor and Electronics Measurement

MPLS sensor is fast and accurate, well-suited for in-line control requirements

Published: Tuesday, May 10, 2022 - 12:00

(Marposs: Auburn Hills, MI) -- Marposs, a world leader in measurement, inspection, and test technologies, has announced the availability of its high-performance STIL MPLS-DM sensor, the newest member of its Chromaline sensors family. This noncontact sensor enables fast, high-resolution gauging of distance, roughness, thickness, and shape of all materials, including transparent and polished mirror surfaces such as glass, plastic or silicon wafers, as well as liquids such as paint film.

The new MPLS-DM provides high quality control and working frequencies up to 2 kHz in standard mode or up to 6 kHz with a reduced range of the sensor. It is offered in five different models with 180 measuring points aligned along a line ranging from 1 mm to 12 mm and minimum measurable thickness capability of 18 µm to 300 µm, depending upon the model. All units measure 448.9 mm x 184 mm x 497 mm (17.6 in. x 7.24 in. x 19.56 in.).

The MPLS-DM synchronizes measurement using an encoder for dynamic acquisitions via Ethernet, with the availability of SDK and protocol commands for easy integration into any system. Based on STIL Chromatic Confocal technology, the MPLS sensor is extremely fast and accurate, making it well-suited for in-line control requirements.

The confocal principal

Confocal chromatic measuring technology splits white light into different spectra using lenses focused on an object through a multilens optical system. The lenses create and send a chromatically aberrated beam to the target. The target reflects the optical beam back to the probe, where it transmits the reflected optical beam to a spectrometer. The reflected optical beam is composed of rays coming from the outside surface of the object being measured and from the internal surfaces that the beam is able to reach.

The reflected light intensity is at a maximum for the wavelengths focused on the surfaces. Electronic processing can then determine the intralayer thickness values of the target, or the distance from the probe to the outside surface and to the intralayer surfaces of the target.

For more information on the MPLS-DM sensor, visit Noncontact Measure With Chromaline Sensor (marposs.com)
Complete information about Marposs solutions can be found at www.marposs.com, by calling (248) 370–0404, or by emailing marposs@us.marposs.com.

Marposs’ STIL MPLS-DM no-contact sensor enables fast, high-resolution gauging of distance, roughness, thickness, and shape of all materials.

About Marposs

Marposs, founded in 1952, has distinguished itself by supplying advanced solutions that improve quality and productivity while reducing manufacturing costs through technologies such as process control, machine tool monitoring, and precision gauging, as well as leak testing and automated assembly and control lines. A long-time key supplier to the automotive and aerospace markets, Marposs’ growth strategy includes the acquisition of high-quality companies that offer innovative products complementary to its portfolio, enabling penetration into new market sectors. The group currently has more than 3,700 employees worldwide and is present in 25 countries through more than 80 offices.


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